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Introductory MEMS: Fabrication and Applications Thomas M. Adams
Introductory MEMS: Fabrication and Applications
Thomas M. Adams
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.
462 pages, 25 black & white illustrations, 25 colour illustrations, 20 black & white tables, biograp
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 21 de diciembre de 2009 |
| Fecha de lanzamiento original | 2008 |
| ISBN13 | 9780387095103 |
| Editores | Springer-Verlag New York Inc. |
| Páginas | 444 |
| Dimensiones | 241 × 166 × 33 mm · 771 g |
| Lengua | Inglés |