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Micromachines as Tools for Nanotechnology - Microtechnology and MEMS Hiroyuki Fujita Softcover reprint of the original 1st ed. 2003 edition
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Micromachines as Tools for Nanotechnology - Microtechnology and MEMS
Hiroyuki Fujita
Addresses the use of MEMS (micro-electro-mechanical systems) and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology.
211 pages, biography
| Medios de comunicación | Libros Paperback Book (Libro con tapa blanda y lomo encolado) |
| Publicado | 29 de octubre de 2012 |
| ISBN13 | 9783642624650 |
| Editores | Springer-Verlag Berlin and Heidelberg Gm |
| Páginas | 211 |
| Dimensiones | 242 × 158 × 18 mm · 354 g |
| Lengua | Alemán |
| Editor | Fujita, Hiroyuki |
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