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Micromachines as Tools for Nanotechnology - Microtechnology and MEMS Hiroyuki Fujita 2003 edition
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Micromachines as Tools for Nanotechnology - Microtechnology and MEMS
Hiroyuki Fujita
Addresses the use of MEMS (micro-electro-mechanical systems) and micromachined devices for the investigation of nanoscience and technology, as well as biotechnology.
211 pages, biography
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 11 de julio de 2003 |
| ISBN13 | 9783540008569 |
| Editores | Springer-Verlag Berlin and Heidelberg Gm |
| Páginas | 211 |
| Dimensiones | 155 × 235 × 14 mm · 489 g |
| Lengua | Alemán |
| Editor | Fujita, Hiroyuki |
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