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Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon - Springer Theses Janusz Bogdanowicz 2012 edition
Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon - Springer Theses
Janusz Bogdanowicz
Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology.
204 pages, biography
| Medios de comunicación | Libros Paperback Book (Libro con tapa blanda y lomo encolado) |
| Publicado | 17 de julio de 2014 |
| ISBN13 | 9783642426865 |
| Editores | Springer-Verlag Berlin and Heidelberg Gm |
| Páginas | 204 |
| Dimensiones | 155 × 235 × 12 mm · 326 g |
| Lengua | Inglés |