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Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon - Springer Theses Janusz Bogdanowicz 2012 edition
Photomodulated Optical Reflectance: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon - Springer Theses
Janusz Bogdanowicz
Among the plethora of measurement techniques, the optical reflectance approach developed in this work is the sole concept that does not require physical contact, making it suitable for non-invasive in-line metrology.
220 pages, 51 black & white illustrations, 23 colour illustrations, biography
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 28 de junio de 2012 |
| ISBN13 | 9783642301070 |
| Editores | Springer-Verlag Berlin and Heidelberg Gm |
| Páginas | 204 |
| Dimensiones | 155 × 235 × 18 mm · 453 g |
| Lengua | Francés |