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Ion Implantation and Synthesis of Materials Michael Nastasi Softcover reprint of hardcover 1st ed. 2006 edition
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Ion Implantation and Synthesis of Materials
Michael Nastasi
Ion implantation is one of the key processing steps in silicon integrated circuit technology. This book presents the physics and materials science of ion implantation and ion beam modification of materials.
263 pages, 131 black & white illustrations, 10 black & white tables, biography
| Medios de comunicación | Libros Paperback Book (Libro con tapa blanda y lomo encolado) |
| Publicado | 12 de febrero de 2010 |
| ISBN13 | 9783642062599 |
| Editores | Springer-Verlag Berlin and Heidelberg Gm |
| Páginas | 263 |
| Dimensiones | 155 × 235 × 14 mm · 394 g |
| Lengua | Inglés |
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