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Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies - NATO Science Series II Yves Pauleau 2002 edition
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Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies - NATO Science Series II
Yves Pauleau
Proceedings of the NATO Advanced Study Institute, held in Kaunas, Lithuania, from 3-14 September 2001
363 pages, biography
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 30 de abril de 2002 |
| ISBN13 | 9781402005244 |
| Editores | Springer-Verlag New York Inc. |
| Páginas | 363 |
| Dimensiones | 155 × 235 × 22 mm · 748 g |
| Editor | Pauleau, Y. |
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