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Electroceramic-Based MEMS: Fabrication-Technology and Applications - Electronic Materials: Science & Technology Nava Setter 2005 edition
Electroceramic-Based MEMS: Fabrication-Technology and Applications - Electronic Materials: Science & Technology
Nava Setter
Focuses on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, and electronic components for high frequency communications.
414 pages, biography
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 3 de marzo de 2005 |
| ISBN13 | 9780387233109 |
| Editores | Springer-Verlag New York Inc. |
| Páginas | 414 |
| Dimensiones | 155 × 235 × 23 mm · 839 g |
| Editor | Setter, Nava |