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Laser Heat-Mode Lithography: Principle and Methods - Springer Series in Materials Science Jingsong Wei 2019 edition
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Laser Heat-Mode Lithography: Principle and Methods - Springer Series in Materials Science
Jingsong Wei
This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applications.
208 pages, 160 Illustrations, color; 22 Illustrations, black and white; XIII, 208 p. 182 illus., 160
| Medios de comunicación | Libros Paperback Book (Libro con tapa blanda y lomo encolado) |
| Publicado | 29 de noviembre de 2020 |
| ISBN13 | 9789811509452 |
| Editores | Springer Verlag, Singapore |
| Páginas | 208 |
| Dimensiones | 150 × 220 × 10 mm · 454 g |
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