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Nanoimprint Lithography: An Enabling Process for Nanofabrication Weimin Zhou Softcover Reprint of the Original 1st 2013 edition
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Nanoimprint Lithography: An Enabling Process for Nanofabrication
Weimin Zhou
Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes.
249 pages, XIII, 249 p.
| Medios de comunicación | Libros Paperback Book (Libro con tapa blanda y lomo encolado) |
| Publicado | 23 de agosto de 2016 |
| ISBN13 | 9783662510865 |
| Editores | Springer-Verlag Berlin and Heidelberg Gm |
| Páginas | 249 |
| Dimensiones | 156 × 233 × 18 mm · 416 g |
| Lengua | Inglés |
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