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Micro and Nano Fabrication: Tools and Processes Hans H. Gatzen 2015 edition
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Micro and Nano Fabrication: Tools and Processes
Hans H. Gatzen
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
519 pages, 303 black & white illustrations, 54 colour illustrations, 25 black & white tables, biogra
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 20 de enero de 2015 |
| ISBN13 | 9783662443941 |
| Editores | Springer-Verlag Berlin and Heidelberg Gm |
| Páginas | 519 |
| Dimensiones | 164 × 240 × 31 mm · 952 g |
| Lengua | Inglés |
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