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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications - Topics in Applied Physics Rainer Behrisch Softcover reprint of the original 1st ed. 1991 edition
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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications - Topics in Applied Physics
Rainer Behrisch
Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface topography changes, this volume is devoted to the characteristic properties of the sputtered particles and technological applications of sputtering.
430 pages, 66 black & white illustrations, 6 black & white tables, biography
| Medios de comunicación | Libros Paperback Book (Libro con tapa blanda y lomo encolado) |
| Publicado | 23 de agosto de 2014 |
| Fecha de lanzamiento original | 2013 |
| ISBN13 | 9783662311042 |
| Editores | Springer-Verlag Berlin and Heidelberg Gm |
| Páginas | 415 |
| Dimensiones | 155 × 235 × 23 mm · 607 g |
| Lengua | Alemán |
| Editor | Behrisch, Rainer |
| Editor | Wittmaack, Klaus |
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