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Temperature Measurement during Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers - MatWerk Denise Reichel 1st ed. 2015 edition
Temperature Measurement during Millisecond Annealing: Ripple Pyrometry for Flash Lamp Annealers - MatWerk
Denise Reichel
Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing.
112 pages, 77 colour illustrations, 7 black & white tables, biography