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Wafer Bonding: Applications and Technology - Springer Series in Materials Science Marin Alexe Softcover reprint of the original 1st ed. 2004 edition
Wafer Bonding: Applications and Technology - Springer Series in Materials Science
Marin Alexe
The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off.
519 pages, 363 black & white illustrations, 20 colour illustrations, biography
| Medios de comunicación | Libros Paperback Book (Libro con tapa blanda y lomo encolado) |
| Publicado | 30 de septiembre de 2011 |
| ISBN13 | 9783642059155 |
| Editores | Springer-Verlag Berlin and Heidelberg Gm |
| Páginas | 504 |
| Dimensiones | 155 × 235 × 27 mm · 725 g |
| Lengua | Alemán |
| Editor | Alexe, Marin |
| Editor | Goesele, Ulrich |