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Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing Hattori 1998 edition
Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing
Hattori
This book thus opens the door to the manufacturing of reliable nanoscale devices and will be extremely useful for every engineer, physicist and technician involved in the production of silicon semiconductor devices.
616 pages, biography
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 17 de septiembre de 1998 |
| ISBN13 | 9783540616726 |
| Editores | Springer-Verlag Berlin and Heidelberg Gm |
| Páginas | 616 |
| Dimensiones | 140 × 216 × 39 mm · 1,12 kg |
| Traductor | Hattori, T. |
| Traductor | Heusler, S. |
| Traductor | Webb, J.P. |