Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures - Joachim Fruhauf - Libros - Springer-Verlag Berlin and Heidelberg Gm - 9783540221098 - 12 de octubre de 2004
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Joachim Fruhauf
Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures 2005 edition

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The idea for this manual was created by the author and Birgit Hannemann (now Professor at the University of Applied Sciences, Bremen, Germany) as an internal catalogue of results of several years of investigations at the Chemnitz University of Technology, Germany. At this base supplying investigations and the elabo- tion of the manuscript were supported by the Stiftung Industrieforschung, Bonn, Germany. In the course of this the coworkers of the author Eva Gärtner, Steffi Krönert and Cornelia Kowol were directly involved. All the SEM pictures result from preparations performed at the Centre of - crotechnologies at the Chemnitz University of Technology (Head: Prof. Thomas Gessner). The author and his coworkers wish to express their thanks to Wolfgang Bräuer (mask design), Norbert Zichner (processes), Iris Höbelt (SEM pictures) and the student Karin Preißler (manuscript layout support). In particular thanks are due to the Stiftung Industrieforschung for the financial support and to the Springer V- lag for the edition of this manual.

222 pages, biography

Medios de comunicación Libros     Hardcover Book   (Libro con lomo y cubierta duros)
Publicado 12 de octubre de 2004
ISBN13 9783540221098
Editores Springer-Verlag Berlin and Heidelberg Gm
Páginas 222
Dimensiones 155 × 235 × 14 mm   ·   453 g
Lengua Inglés   Alemán  

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