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Toward Inertial-Navigation-on-Chip: The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes - Springer Theses Haoran Wen 2019 edition
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Toward Inertial-Navigation-on-Chip: The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes - Springer Theses
Haoran Wen
This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes.
127 pages, 92 Tables, color; 83 Illustrations, color; 9 Illustrations, black and white; XIII, 127 p.
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 25 de septiembre de 2019 |
| ISBN13 | 9783030254698 |
| Editores | Springer Nature Switzerland AG |
| Páginas | 127 |
| Dimensiones | 150 × 220 × 20 mm · 454 g |
| Lengua | Alemán |
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