Mechanical Properties of Silicon Based Compounds Silicides - Pelleg - Libros - Springer Nature Switzerland AG - 9783030225971 - 30 de julio de 2019
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Mechanical Properties of Silicon Based Compounds Silicides 1st ed. 2019 edition

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This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. A special chapter is given on deformation in silicides in the nano scale.


274 pages, 10 Tables, color; 12 Illustrations, color; 303 Illustrations, black and white; XVI, 274 p

Medios de comunicación Libros     Book
Publicado 30 de julio de 2019
ISBN13 9783030225971
Editores Springer Nature Switzerland AG
Páginas 274
Dimensiones 150 × 220 × 20 mm   ·   585 g
Lengua Alemán  

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