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Mechanical Properties of Silicon Based Compounds Silicides Pelleg 1st ed. 2019 edition
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Mechanical Properties of Silicon Based Compounds Silicides
Pelleg
This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. A special chapter is given on deformation in silicides in the nano scale.
274 pages, 10 Tables, color; 12 Illustrations, color; 303 Illustrations, black and white; XVI, 274 p
| Medios de comunicación | Libros Book |
| Publicado | 30 de julio de 2019 |
| ISBN13 | 9783030225971 |
| Editores | Springer Nature Switzerland AG |
| Páginas | 274 |
| Dimensiones | 150 × 220 × 20 mm · 585 g |
| Lengua | Alemán |
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