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Introduction to Focused Ion Beam Nanometrology - IOP Concise Physics David C. Cox
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Introduction to Focused Ion Beam Nanometrology - IOP Concise Physics
David C. Cox
This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology.
104 pages
| Medios de comunicación | Libros Paperback Book (Libro con tapa blanda y lomo encolado) |
| Publicado | 1 de octubre de 2015 |
| ISBN13 | 9781681740201 |
| Editores | Morgan & Claypool Publishers |
| Páginas | 104 |
| Dimensiones | 253 × 178 × 8 mm · 163 g |
| Lengua | Inglés |
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