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Mems Mechanical Sensors Steve P. Beeby
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Mems Mechanical Sensors
Steve P. Beeby
The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.
284 pages, 1, black & white illustrations
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 30 de abril de 2004 |
| ISBN13 | 9781580535366 |
| Editores | Artech House Publishers |
| Páginas | 284 |
| Dimensiones | 184 × 256 × 23 mm · 644 g |
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