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Environmental, Safety, and Health Issues in IC Production: Volume 447 - MRS Proceedings
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Environmental, Safety, and Health Issues in IC Production: Volume 447 - MRS Proceedings
This book provides an overview of the available scientific information on environmentally benign IC production. A broad range of topics is addressed including work on resource reduction for chemicals, gases and DI water, reuse or recycling of chemicals, waste treatment strategies, environmentally friendly alternative technologies and analytical technologies for environmental studies.
154 pages
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 5 de junio de 1997 |
| ISBN13 | 9781558993518 |
| Editores | Materials Research Society |
| Páginas | 168 |
| Dimensiones | 161 × 237 × 20 mm · 394 g |
| Lengua | Inglés |
| Editor | Bowling, Allen |
| Editor | Heyns, Marc |
| Editor | Reif, Rafael (Massachusetts Institute of Technology) |
| Editor | Tonti, Alessandro |
