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Crystal Growth and Evaluation of Silicon for VLSI and ULSI Eranna, Golla (Central Electronics Engineering Research Institute (CEERI), Pilani, India) 1.º edición
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Crystal Growth and Evaluation of Silicon for VLSI and ULSI
Eranna, Golla (Central Electronics Engineering Research Institute (CEERI), Pilani, India)
Written for engineers and researchers working in semiconductor fabrication industries, this book discusses the systematic growth of Si single crystals using standard techniques with add-on layers for specific applications. It is one of the first books to cover the complete evaluation of Si wafers, from sand to useful wafers for device fabrication. The book shows how to evaluate the suitability of Si wafers in VLSI and ULSI processing technology before implementing the highly sophisticated and systematically drawn process methodology.
430 pages, 264 black & white illustrations, 23 black & white tables
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 8 de diciembre de 2014 |
| ISBN13 | 9781482232813 |
| Editores | Taylor & Francis Inc |
| Páginas | 430 |
| Dimensiones | 178 × 254 × 28 mm · 952 g |
| Lengua | Inglés |
