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Chemical Vapor Deposition Polymerization: the Growth and Properties of Parylene Thin Films Fortin, Jeffrey B. (Electronic Materials and Manufacturing Laboratory, Nisakyauna, New York, Usa) 2004 edition
Chemical Vapor Deposition Polymerization: the Growth and Properties of Parylene Thin Films
Fortin, Jeffrey B. (Electronic Materials and Manufacturing Laboratory, Nisakyauna, New York, Usa)
Provides information on the deposition process and equipment, and on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. This book includes methods to characterize a deposition system's pumping properties and monitor the deposition process via mass spectrometry.
102 pages, biography
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 30 de noviembre de 2003 |
| ISBN13 | 9781402076886 |
| Editores | Kluwer Academic Publishers |
| Páginas | 102 |
| Dimensiones | 156 × 234 × 7 mm · 331 g |
| Lengua | Inglés |