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An Introduction to Microelectromechanical Systems Engineering
Nadim Maluf
Provides a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describe in detail the materials used in producing MEMS-including silicon, polymers, and glass and quartz substrates-as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications. DLC: Microelectromechanical systems.
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 30 de noviembre de 1999 |
| ISBN13 | 9780890065815 |
| Editores | Artech House Print on Demand |
| Páginas | 265 |
| Dimensiones | 158 × 24 × 232 mm · 644 g |
| Lengua | Inglés |
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