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Handbook of Chemical Vapor Deposition: Principles, Technology and Applications Pierson, Hugh O. (Sandia National Laboratories (retired)) 2.º edición
Handbook of Chemical Vapor Deposition: Principles, Technology and Applications
Pierson, Hugh O. (Sandia National Laboratories (retired))
Offers an understanding of the advances in the Chemical Vapor Deposition (CVD) process. This book features data on both Plasma CVD and metallo-organic CVD processes. It also explains growing importance of CVD in production of semiconductor and related applications.
506 pages
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 31 de diciembre de 1999 |
| ISBN13 | 9780815514329 |
| Editores | William Andrew Publishing |
| Páginas | 506 |
| Dimensiones | 164 × 237 × 40 mm · 843 g |
| Lengua | Inglés |