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Handbook of VLSI Microlithography: Principles, Technology and Applications William B Glendinning
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Handbook of VLSI Microlithography: Principles, Technology and Applications
William B Glendinning
Offers a look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and x-ray lithography.
671 pages
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 1991 |
| Fecha de lanzamiento original | 2010 |
| ISBN13 | 9780815512813 |
| Editores | William Andrew Publishing |
| Páginas | 671 |
| Dimensiones | 152 × 229 × 36 mm · 1,06 kg |
| Editor | Glendinning, William B. (Motorola, USA) |
| Editor | Helbert, John N. (Motorola, USA) |
