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Scanning Probe Lithography - Microsystems Hyongsok T. Soh 2001 edition
Scanning Probe Lithography - Microsystems
Hyongsok T. Soh
Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample.
197 pages, biography
| Medios de comunicación | Libros Hardcover Book (Libro con lomo y cubierta duros) |
| Publicado | 30 de junio de 2001 |
| ISBN13 | 9780792373612 |
| Editores | Springer |
| Páginas | 197 |
| Dimensiones | 155 × 235 × 14 mm · 498 g |
| Lengua | Inglés |