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Physics of Radiofrequency Capacitive Discharge V. P. Savinov 1.º edición
Physics of Radiofrequency Capacitive Discharge
V. P. Savinov
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, and relevant specialties.
322 pages
| Medios de comunicación | Libros Paperback Book (Libro con tapa blanda y lomo encolado) |
| Publicado | 30 de junio de 2020 |
| ISBN13 | 9780367571627 |
| Editores | Taylor & Francis Ltd |
| Páginas | 322 |
| Dimensiones | 150 × 220 × 10 mm · 453 g |
| Lengua | Inglés |